Chemical Explosion dry screw vacuum pumps, chemical preservative oil-free screw vacuum pumps dry screw vacuum pump Typical Applications: * Preparation of low pressure chemical vapor deposition of polycrystalline silicon semiconductor etching process *. Often used or corrosive gases and abrasive particles generated in the production process * Some of these processes produce particles in addition to semiconductor process, the particles do not want to mix the oil pump, and hope particulate discharge pump outside, use a certain type of stem * Mechanical vacuum distillation to meet the requirements in the chemical industry, pharmaceutical industry, food industry, drying, degassing, packaging, etc., to prevent pollution caused by organic solvents, suitable for dry vacuum pumps industries and markets oil-free * used as general cleaning forepump vacuum system to prevent oil contamination * chemical petrochemical pharmaceutical medical electronics steel etc. Typical applications? chemical pharmaceutical processes? solvent recovery? vacuum forming? experimental vacuum? central vacuum system? molding? crystallization? dry etching? sputtering ? smelting steel? aerial simulation? vapor recovery> etc.